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Date: 2010
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.14/88204
Description: The electrical and optical characteristics of a dielectric barrier discharge (DBD) based neon excimer lamp generating output in the extreme ultraviolet (EUV) spectral range (λ=84nm) have been investig ... More
Reviewed: Reviewed
Date: 2009
Subject Keyword: plasma | light source | vuv
Language: eng
Resource Type: conference paper abstract
Identifier: http://hdl.handle.net/1959.14/1208583
Description: 1 page(s)
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